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C:CHEMISTRY; METALLURGY
 C23: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL ; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL (treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D, C25F)
  C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
   C23C2/00: Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
   C23C2/00B: Apparatus, e.g. crucibles, heating devices
   C23C2/00D: Pattern or selective deposit without pre-treatment of the material to be coated
   C23C2/02: Pre-treatment of the material to be coated, e.g. for coating on selected surface areas
   C23C2/04: characterised by the coating material
   C23C2/06: . . Zinc or cadmium or alloys based thereon
   C23C2/08: . . Tin or alloys based thereon
   C23C2/10: . . Lead or alloys based thereon
   C23C2/12: . . Aluminium or alloys based thereon
   C23C2/14: Removing excess of molten coatings; Controlling or regulating the coating thickness
   C23C2/16: . . using fluids under pressure, e.g. air knives
   C23C2/18: . . . Removing excess of molten coatings from elongated material
   C23C2/18B: . . . . Tubes; Wires
   C23C2/20: . . . . Strips; Plates
   C23C2/22: . . by rubbing, e.g. using knives, e.g. rubbing solids
   C23C2/24: . . using magnetic or electric fields
   C23C2/26: After-treatment
   C23C2/26B: . . by applying solid particles to the molten coating
   C23C2/28: . . Thermal aftertreatment, e.g. treatment in oil bath
   C23C2/28B: . . . for remelting the coating
   C23C2/30: Fluxes or coverings on molten baths
   C23C2/32: using vibratory energy applied to the bath or substrate
   C23C2/34: characterised by the shape of the material to be treated
   C23C2/36: . . Elongated material
   C23C2/38: . . . Wires; Tubes
   C23C2/38B: . . . . Tubes of specific length
   C23C2/40: . . . Plates; Strips
   C23C2/40B: . . . . Plates of specific length
   C23C4/00: Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
   C23C4/00B: Pattern or selective deposit without pre-treatment of the material to be coated
   C23C4/02: Pre-treatment of the material to be coated, e.g. for coating on selected surface areas
   C23C4/04: characterised by the coating material
   C23C4/06: . . Metallic material e.g. mixture of metallic alloys and hard particles like SiC and WC C23C4/08B takes precedence
   C23C4/06B: . . . containing non-metal elements, e.g. C, Si, B, P or As, as free particles
   C23C4/08: . . . containing only metal elements
   C23C4/08B: . . . . MCrAl or MCrAlY type alloys where M = Ni,Co,Fe
   C23C4/10: . . Oxides, borides, carbides, nitrides, silicides or mixtures thereof
   C23C4/10B: . . . Oxides
   C23C4/12: characterised by the method of spraying
   C23C4/12A: . . Spraying molten metal
   C23C4/12B: . . utilising detonation apparatus for spraying by means of detonations in general B05B7/00A
   C23C4/12D: . . utilising flame spraying apparatus for spraying by means of flame in general B05B7/20
   C23C4/12G: . . utilising wire arc spraying apparatus for spraying by means of electric arc in general B05B7/22
   C23C4/12L: . . utilising plasma spraying plasma torches in general H05H1/26, apparatus for spraying by means of electric arc in general B05B7/22
   C23C4/12N: . . Spraying in vacuum or in an inert gas chamber
   C23C4/14: . . for covering elongated material
   C23C4/16: . . . Wires; Tubes
   C23C4/18: After-treatment
   C23C4/18B: . . Separation of the coating from the substrate
   C23C6/00: Coating by casting molten material on the substrate
   C23C8/00: Solid state diffusion of only non-metal elements into metallic material surfaces ; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
   C23C8/02: Pre-treatment of the material to be coated
   C23C8/04: Treatment of selected surface areas, e.g. using masks
   C23C8/06: using gases
   C23C8/08: . . onyl one element being applied
   C23C8/10: . . . Oxidising
   C23C8/12: . . . . using elemental oxygen or ozone
   C23C8/14: . . . . . Oxidising of ferrous surfaces
   C23C8/16: . . . . using oxygen-containing compounds, e.g. water, carbon dioxide
   C23C8/18: . . . . . oxidising of ferrous surfaces
   C23C8/20: . . . Carburising
   C23C8/22: . . . . of ferrous surfaces
   C23C8/24: . . . Nitriding
   C23C8/26: . . . . of ferrous surfaces
   C23C8/28: . . more than one element being applied in one step
   C23C8/30: . . . Carbo-nitriding
   C23C8/32: . . . . of ferrous surfaces
   C23C8/34: . . more than one element being applied in more than one step
   C23C8/36: . . using ionised gases, e.g. ionitriding
   C23C8/38: . . . Treatment of ferrous surfaces
   C23C8/40: using liquids, e.g. salt baths, liquid suspensions
   C23C8/42: . . only one element being applied
   C23C8/44: . . . Carburising
   C23C8/46: . . . . of ferrous surfaces
   C23C8/48: . . . Nitriding
   C23C8/50: . . . . of ferrous surfaces
   C23C8/52: . . more than one element being applied in one step
   C23C8/54: . . . Carbo-nitriding
   C23C8/56: . . . . of ferrous surfaces
   C23C8/58: . . more than one element being applied in more than one step
   C23C8/60: using solids, e.g. powders, pastes
   C23C8/62: . . only one element being applied
   C23C8/64: . . . Carburising
   C23C8/66: . . . . of ferrous surfaces
   C23C8/68: . . . Boronising
   C23C8/70: . . . . of ferrous surfaces
   C23C8/72: . . more than one element being applied in one step
   C23C8/74: . . . Carbo-nitriding
   C23C8/76: . . . . of ferrous surfaces
   C23C8/78: . . more than one element being applied in more than one step
   C23C8/80: After-treatment
   C23C10/00: Solid state diffusion of only metal elements or silicon into metallic material surfaces
   C23C10/02: Pretreatment of the material to be coated
   C23C10/04: Diffusion into selected surface areas, e.g. using masks
   C23C10/06: using gases
   C23C10/08: . . only one element being diffused
   C23C10/10: . . . Chromising
   C23C10/12: . . . . of ferrous surfaces
   C23C10/14: . . more than one element being diffused in one step
   C23C10/16: . . more than one element being diffused in more than one step
   C23C10/18: using liquids, e.g. salt baths, liquid suspensions
   C23C10/20: . . only one element being diffused
   C23C10/22: . . . Metal melt containing the element to be diffused
   C23C10/24: . . . Salt bath containing the element to be diffused
   C23C10/26: . . more than one element being diffused
   C23C10/28: using solids, e.g. powders, pastes
   C23C10/30: . . using a layer of powder or paste on the surface
   C23C10/32: . . . Chromising
   C23C10/34: . . Embedding in a powder mixture, i.e. pack cementation
   C23C10/36: . . . only one element being diffused
   C23C10/38: . . . . Chromising
   C23C10/40: . . . . . of ferrous surfaces
   C23C10/42: . . . . . . in the presence of volatile transport additives, e.g. halogenated substances
   C23C10/44: . . . . Siliconising
   C23C10/46: . . . . . of ferrous surfaces
   C23C10/48: . . . . Aluminising
   C23C10/50: . . . . . of ferrous surfaces
   C23C10/52: . . . more than one element being diffused in one step
   C23C10/54: . . . . Diffusion of at least chromium
   C23C10/56: . . . . . and at least aluminium
   C23C10/58: . . . more than one element being diffused in more than one step
   C23C10/60: After-treatment
   C23C12/00: Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
   C23C12/02: Diffusion in one step
   C23C14/00: Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
   C23C14/00B: Separation of the coating from the substrate
   C23C14/00D: Coating on a liquid substrate
   C23C14/00E: characterized by the colour of the layer
   C23C14/00F: Reactive sputtering or evaporation
   C23C14/00F1: . . Activation or excitation of reactive gases outside the coating chamber
   C23C14/00F1B: . . . Bombardment of substrates by reactive ion beams
   C23C14/00F2: . . Reactive sputtering
   C23C14/00F2B: . . . Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
   C23C14/00F2D: . . . Activation or excitation of reactive gases outside the coating chamber
   C23C14/00F2D2: . . . . Bombardment of substrates by reactive ion beams
   C23C14/00F2F: . . . using reactive gases other than O2, H2O, N2, NH3 or CH4
   C23C14/00F2H: . . . characterised by means for introducing or removing gases
   C23C14/00F2J: . . . characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
   C23C14/00F2L: . . . by exposing the substrates to reactive gases intermittently
   C23C14/00F2L2: . . . . by moving the substrates between spatially separate sputtering and reaction stations
   C23C14/00F2N: . . . Producing gradient compositions
   C23C14/00F2P: . . . in metallic mode
   C23C14/00F2R: . . . in transition mode
   C23C14/02: Pre-treatment of the material to be coated
   C23C14/02A: . . Cleaning or etching treatments
   C23C14/02A2: . . . by means of bombardment with energetic particles or radiation
   C23C14/02B: . . Deposition of sublayers, e.g. to promote adhesion of the coating C23C14/02D takes precedence
   C23C14/02B2: . . . Metallic sublayers
   C23C14/02D: . . Graded interfaces
   C23C14/02F: . . Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
   C23C14/04: Coating on selected surface areas, e.g. using masks
   C23C14/04B: . . using masks
   C23C14/04B2: . . . using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
   C23C14/04D: . . Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
   C23C14/04F: . . using irradiation by energy or particles
   C23C14/06: characterised by the coating material
   C23C14/06B: . . Carbon
   C23C14/06B2: . . . Diamond
   C23C14/06C: . . AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
   C23C14/06D: . . Sulfides, selenides or tellurides
   C23C14/06D2: . . . of zinc, cadmium or mercury
   C23C14/06E: . . Carbides
   C23C14/06F: . . Nitrides C23C14/06C takes precedence
   C23C14/06F2: . . . Boron nitride
   C23C14/06F4: . . . Silicon nitride
   C23C14/06F6: . . . Carbon nitride
   C23C14/06G: . . Carbonitrides
   C23C14/06H: . . Borides
   C23C14/06J: . . Oxynitrides
   C23C14/06L: . . Silicides
   C23C14/06N: . . Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
   C23C14/06P: . . Halides
   C23C14/08: . . Oxides
   C23C14/08D: . . . of aluminium, magnesium or beryllium
   C23C14/08F: . . . of alkaline earth metals
   C23C14/08H: . . . of refractory metals or yttrium
   C23C14/08J: . . . of iron group metals
   C23C14/08L: . . . of zinc, germanium, cadmium, indium, tin, thallium or bismuth
   C23C14/08N: . . . of copper or solid solutions thereof
   C23C14/08P: . . . of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
   C23C14/10: . . Glass or silica
   C23C14/12: . . Organic material
   C23C14/14: . . Metallic material, boron or silicon
   C23C14/16: . . . on metallic substrates or on substrates of boron or silicon
   C23C14/16B: . . . . by cathodic sputtering
   C23C14/18: . . . on other inorganic substrates
   C23C14/18B: . . . . by cathodic sputtering
   C23C14/20: . . . on organic substrates
   C23C14/20B: . . . . by cathodic sputtering
   C23C14/22: characterised by the process of coating
   C23C14/22A: . . Ion beam deposition C23C14/46, C23C14/48 take precedence
   C23C14/22B: . . specialy adapted for coating particles
   C23C14/22D: . . Oblique incidence of vaporised material on substrate
   C23C14/22D2: . . . in order to form films with columnar structure
   C23C14/22F: . . Gas flow assisted PVD deposition
   C23C14/24: . . Vacuum evaporation
   C23C14/24A: . . . Crucibles for source material C23C14/28, C23C14/30 take precedence
   C23C14/24B: . . . Replenishment of source material
   C23C14/26: . . . by resistance or inductive heating of the source
   C23C14/28: . . . by wave energy or particle radiation
   C23C14/30: . . . . by electron bombardment
   C23C14/32: . . . by explosion; by evaporation and subsequent ionisation of the vapours e.g. ion-plating
   C23C14/32A: . . . . Electric arc evaporation
   C23C14/34: . . Sputtering
   C23C14/34B: . . . Cathode assembly for sputtering apparatus, e.g. Target
   C23C14/34B2: . . . . Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
   C23C14/34B4: . . . . using heated targets
   C23C14/34B6: . . . . using liquid targets
   C23C14/34C: . . . Applying energy to the substrate during sputtering
   C23C14/34C2: . . . . using an ion beam
   C23C14/34C4: . . . . using substrate bias
   C23C14/34D: . . . using other particles than noble gas ions C23C14/00F2, C23C14/46 take precedence
   C23C14/34F: . . . using more than one target C23C14/56 takes precedence
   C23C14/34G: . . . Introduction of auxiliary energy into the plasma
   C23C14/34G2: . . . . using electrons, e.g. triode sputtering
   C23C14/34J: . . . using pulsed power to the target
   C23C14/34P: . . . Variation of parameters during sputtering
   C23C14/35: . . . by application of a magnetic field, e.g. magnetron sputtering C23C14/34D takes precedence
   C23C14/35B: . . . . using a magnetic field in close vicinity to the substrate
   C23C14/35D: . . . . using more than one target C23C14/56 takes precedence
   C23C14/35F: . . . . Introduction of auxiliary energy into the plasma
   C23C14/35F2: . . . . . using electrons, e.g. triode sputtering
   C23C14/35F4: . . . . . Microwaves, e.g. electron cyclotron resonance enhanced sputtering
   C23C14/35F6: . . . . . Inductive energy
   C23C14/46: . . . by ion beam produced by an external ion source
   C23C14/48: . . Ion implantation
   C23C14/50: . . Substrate holders
   C23C14/50B: . . . for rotation of the substrates
   C23C14/52: . . Means for observation of the coating process
   C23C14/54: . . Controlling or regulating the coating process
   C23C14/54B: . . . Heating or cooling of the substrates
   C23C14/54D: . . . Controlling the film thickness or evaporation rate
   C23C14/54D2: . . . . using measurement on the vapor source
   C23C14/54D4: . . . . using measurement in the gas phase
   C23C14/54D6: . . . . using measurement on deposited material
   C23C14/54D6B: . . . . . using crystal oscillators
   C23C14/54D6D: . . . . . using optical methods
   C23C14/54F: . . . Controlling the composition
   C23C14/56: . . Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
   C23C14/56B: . . . for coating elongated substrates
   C23C14/56D: . . . Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
   C23C14/56D2: . . . . using a load-lock chamber
   C23C14/56F: . . . Transferring the substrates through a series of coating stations C23C14/56B takes precedence
   C23C14/58: After-treatment
   C23C14/58B: . . Thermal treatment
   C23C14/58B2: . . . using lasers
   C23C14/58B4: . . . using electron bombardment
   C23C14/58D: . . Plasma treatment
   C23C14/58D2: . . . Ion beam bombardment
   C23C14/58F: . . Non-reactive treatment
   C23C14/58H: . . Reactive treatment
   C23C14/58H2: . . . Oxidation
   C23C14/58H4: . . . Nitriding
   C23C14/58H6: . . . Treatment with sulfur, selenium or tellurium
   C23C14/58J: . . Removal of material
   C23C14/58J2: . . . by mechanical treatment
   C23C14/58L: . . Mechanical treatment (involving removal of material 14/58J2)
   C23C14/58N: . . Mixing of deposited material
   C23C16/00: Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
   C23C16/00D: Coating on a liquid substrate
   C23C16/00F: characterized by the colour of the layer
   C23C16/01: on temporary substrates, e.g. substrates subsequently removed by etching
   C23C16/02: Pretreatment of the material to be coated
   C23C16/02B: . . by heating
   C23C16/02B2: . . . in a reactive atmosphere C23C16/02D takes precedence
   C23C16/02D: . . by cleaning or etching
   C23C16/02D2: . . . by etching with a reactive gas
   C23C16/02D4: . . . by etching with a plasma
   C23C16/02F: . . Physical treatment to alter the texture of the surface, e.g. scratching or polishing
   C23C16/02F2: . . . Irradiation with laser or particle beam
   C23C16/02H: . . Deposition of sub-layers, e.g. to promote the adhesion of the main coating
   C23C16/02H2: . . . of metallic sub-layers C23C16/02H4 takes precedence
   C23C16/02H4: . . . Graded interfaces
   C23C16/04: Coating on selected surface areas, e.g. using masks
   C23C16/44N: . . Methods specially adapted for making fine particles
   C23C16/04B: . . using masks
   C23C16/04D: . . Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
   C23C16/04F: . . using irradiation by energy or particles
   C23C16/06: characterised by the deposition of metallic material
   C23C16/08: . . from metal halides
   C23C16/10: . . . Deposition of chromium only
   C23C16/12: . . . Deposition of aluminium only
   C23C16/14: . . . Deposition of only one other metal element
   C23C16/16: . . from metal carbonyl compounds
   C23C16/18: . . from metallo-organic compounds
   C23C16/20: . . . Deposition of aluminium only
   C23C16/22: characterised by the deposition of inorganic material, other than metallic material
   C23C16/24: . . Deposition of silicon only
   C23C16/26: . . Deposition of carbon only
   C23C16/27: . . . Diamond only
   C23C16/27B: . . . . using other elements in the gas phase besides carbon and hydrogen (C23C16/27D2 takes precedence)[N0008]
   C23C16/27B2: . . . . . Doping or introduction of a secondary phase in the diamond[N0008]
   C23C16/27B2D: . . . . . . Introduction of a secondary phase in the diamond[N0008]
   C23C16/27C: . . . . using hot filaments
   C23C16/27D: . . . . Control of diamond crystallography[N0008]
   C23C16/27D2: . . . . . using other elements in the gas phase besides carbon and hydrogen[N0008]
   C23C16/27E: . . . . using DC, AC or RF discharges
   C23C16/27F: . . . . using hot filaments
   C23C16/27F2: . . . . . using other elements in the gas phase besides carbon and hydrogen (C23C16/27F4B takes precedence)[N0008]
   C23C16/27F2B: . . . . . . Doping or introduction of a secondary phase in the diamond[N0008]
   C23C16/27F4: . . . . . Control of diamond crystallography[N0008]
   C23C16/27F4B: . . . . . . using other elements in the gas phase besides carbon and hydrogen[N0008]
   C23C16/27G: . . . . using microwave discharges
   C23C16/27H: . . . . using combustion torches[N0008]
   C23C16/27H2: . . . . . using other elements in the gas phase than carbon, hydrogen and oxygen[N0008]
   C23C16/27H2B: . . . . . . Doping or introduction of a secondary phase in the diamond[N0008]
   C23C16/27H4: . . . . . Control of diamond crystallography[N0008]
   C23C16/27J: . . . . using combustion torches
   C23C16/27K: . . . . using DC, AC or RF discharges[N0008]
   C23C16/27K2: . . . . . using other elements in the gas phase besides carbon and hydrogen[N0008]
   C23C16/27K2B: . . . . . . Doping or introduction of a secondary phase in the diamond[N0008]
   C23C16/27K4: . . . . . Control of diamond crystallography[N0008]
   C23C16/27L: . . . . using plasma jets
   C23C16/27M: . . . . using microwave discharges[N0008]
   C23C16/27M2: . . . . . using other elements in the gas phase besides carbon and hydrogen (C23C16/27M4B takes precedence)[N0008]
   C23C16/27M2B: . . . . . . Doping or introduction of a secondary phase in the diamond[N0008][C0307]
   C23C16/27M4: . . . . . Control of diamond crystallography[N0008]
   C23C16/27M4B: . . . . . . using other elements in the gas phase besides carbon and hydrogen[N0008]
   C23C16/27N: . . . . using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
   C23C16/27P: . . . . using plasma jets[N0008]
   C23C16/27P2: . . . . . using other elements in the gas phase besides carbon, hydrogen and inert gas[N0008]
   C23C16/27P2B: . . . . . . Doping or introduction of a secondary phase in the diamond[N0008]
   C23C16/27P4: . . . . . Control of diamond crystallography[N0008]
   C23C16/27Q: . . . . doping or introduction of a secondary phase in the diamond
   C23C16/27S: . . . . control of diamond crystallography
   C23C16/28: . . Deposition of only one other non-metal element
   C23C16/30: . . Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
   C23C16/30B: . . . AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
   C23C16/30B2: . . . . Nitrides
   C23C16/30C: . . . Sulfides, selenides, or tellurides
   C23C16/30C2: . . . . AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te
   C23C16/30E: . . . Oxynitrides
   C23C16/32: . . . Carbides
   C23C16/32B: . . . . Silicon carbide
   C23C16/34: . . . Nitrides C23C16/30B2 takes precedence
   C23C16/34B: . . . . Boron nitride
   C23C16/34C: . . . . Silicon nitride
   C23C16/34D: . . . . Carbon nitride
   C23C16/36: . . . Carbonitrides
   C23C16/38: . . . Borides
   C23C16/40: . . . Oxides
   C23C16/40B: . . . . containing silicon
   C23C16/40B2: . . . . . Silicon dioxide
   C23C16/40D: . . . . of aluminium, magnesium or beryllium
   C23C16/40F: . . . . of alkaline earth metals
   C23C16/40H: . . . . of refractory metals or yttrium
   C23C16/40J: . . . . of iron group metals
   C23C16/40L: . . . . of zinc, germanium, cadmium, indium, tin, thallium or bismuth
   C23C16/40N: . . . . of copper or solid solutions thereof
   C23C16/40P: . . . . of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide
   C23C16/42: . . . Silicides
   C23C16/44: characterised by the method of coating
   C23C16/442: . . using fluidised bed process
   C23C16/448: . . characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
   C23C16/448B: . . . by evaporation using carrier gas in contact with the source material C23C16/448H takes precedence
   C23C16/448B2: . . . . by bubbling of carrier gas through liquid source material
   C23C16/448B4: . . . . using a porous body
   C23C16/448D: . . . by evaporation without using carrier gas in contact with the source material C23C16/448H takes precedence
   C23C16/448H: . . . by producing an aerosol and subsequent evaporation of the droplets or particles
   C23C16/448J: . . . by using a condenser
   C23C16/448K: . . . by in situ generation of reactive gas by chemical or electrochemical reaction
   C23C16/44A: . . Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
   C23C16/44A10: . . . [N: by purging residual gases from the reaction chamber or gas lines]
   C23C16/44A12: . . . characterised by sealing means
   C23C16/44A2: . . . Reduction of impurities in the source gas
   C23C16/44A4: . . . Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
   C23C16/44A6: . . . Cleaning of reactor or parts inside the reactor by using reactive gases
   C23C16/44A8: . . . Cleaning of reactor or reactor parts by using wet or mechanical methods
   C23C16/44C: . . Cooling of the reaction chamber walls C23C16/455K8 takes precedence
   C23C16/44H: . . Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
   C23C16/44J: . . Electrochemical vapour deposition (EVD)
   C23C16/44L: . . Acoustic wave CVD
   C23C16/44P: . . Methods specially adapted for coating powder
   C23C16/44R: . . Methods for making free-standing articles C23C16/00B takes precedence
   C23C16/452: . . . by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
   C23C16/453: . . passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
   C23C16/455: . . characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
   C23C16/455A: . . . [N: Flow conditions in reaction chamber]
   C23C16/455A2: . . . . [N: Laminar flow]
   C23C16/455A4: . . . . [N: Turbulent flow]
   C23C16/455A6: . . . . [N: Radial flow]
   C23C16/455A8: . . . . [N: Jet streams]
   C23C16/455B: . . . [N: Premixing before introduction in the reaction chamber]
   C23C16/455C: . . . [N: Mixing in close vicinity to the substrate]
   C23C16/455D: . . . [N: Confinement of gases to vicinity of substrate]
   C23C16/455E: . . . [N: Inert gas curtains]
   C23C16/455E2: . . . . [N: the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery]
   C23C16/455F: . . . [N: Pulsed gas flow or change of composition over time]
   C23C16/455F2: . . . . Atomic layer deposition (ALD)
   C23C16/455F2B: . . . . . characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
   C23C16/455F2B2: . . . . . . specially adapted for making a layer stack of alternating different compositions or gradient compositions
   C23C16/455F2B4: . . . . . . specially adapted for making ternary or higher compositions
   C23C16/455F2B6: . . . . . . Use of auxiliary reactants other than used for contributing to the composition of the main film, e.g. catalysts, activators or scavengers
   C23C16/455F2B8: . . . . . . Use of plasma, radiation or electromagnetic fields
   C23C16/455F2B8B: . . . . . . . Plasma being used continuously during the ALD cycle
   C23C16/455F2B8D: . . . . . . . Plasma being used non-continuously in between ALD reactions C23C16/56 takes precedence
   C23C16/455F2B8F: . . . . . . . Plasma being used non-continuously during the ALD reactions
   C23C16/455F2D: . . . . . characterized by the apparatus
   C23C16/455F2D2: . . . . . . specially adapted for a substrate stack in the ALD reactor
   C23C16/455F2D4: . . . . . . having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
   C23C16/455F2D4B: . . . . . . . for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
   C23C16/455F2H: . . . . . characterized by the use of precursors specially adapted for ALD
   C23C16/455F2K: . . . . . applied in non-semiconductor technology
   C23C16/455F4: . . . .  Atomic layer deposition with inert gas puring step[N0601]
   C23C16/455G: . . . [N: Pulsed pressure or control pressure]
   C23C16/455H: . . . [N: Diffusion of reactive gas to substrate]
   C23C16/455J: . . . Gas plumbing upstream of the reaction chamber
   C23C16/455K: . . . [N: Gas nozzles]
   C23C16/455K10: . . . . [N: Nozzles for more than one gas]
   C23C16/455K12: . . . . [N: Coaxial inlets for each gas]
   C23C16/455K14: . . . . [N: Elongated nozzles, tubes with holes]
   C23C16/455K16: . . . . [N: Perforated rings]
   C23C16/455K2: . . . . [N: Shower nozzles]
   C23C16/455K4: . . . . [N: Porous nozzles]
   C23C16/455K6: . . . . [N: Heated nozzles]
   C23C16/455K8: . . . . [N: Cooled nozzles]
   C23C16/455M: . . . [N: Expansion of gas before it reaches the substrate]
   C23C16/455N: . . . [N: Compression of gas before it reaches the substrate]
   C23C16/455P: . . . [N: Mechanical means for changing the gas flow]
   C23C16/455P2: . . . . [N: Movable means, e.g. fans]
   C23C16/455P4: . . . . [N:Fixed means, e.g. wings, baffles]
   C23C16/455R: . . . [N: Recirculation of reactive gases]
   C23C16/455T: . . . [N: Atmospheric CVD gas inlets with no enclosed reaction chamber]
   C23C16/455V: . . . Reactive back side gas
   C23C16/458: . . characterised by the method used for supporting substrates in the reaction chamber
   C23C16/458B: . . . characterised by material of construction or surface finish of the means for supporting the substrate
   C23C16/458D: . . . Rigid and flat substrates, e.g. plates or discs C23C16/458B takes precedence
   C23C16/458D2: . . . . the substrate being supported substantially horizontally
   C23C16/458D2B: . . . . . the substrate being rotated
   C23C16/458D2D: . . . . . Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
   C23C16/458D2F: . . . . . Elements in the interior of the support, e.g. electrodes, heating or cooling devices
   C23C16/458D4: . . . . the substrate being supported substantially vertically
   C23C16/458D4B: . . . . . the substrate being rotated
   C23C16/46: . . characterised by the method used for heating the substrate
   C23C16/46B: . . . Cooling of the substrate
   C23C16/46B2: . . . . using thermal contact gas
   C23C16/48: . . by irradiation, e.g. photolysis, radiolysis, particle radiation
   C23C16/48B: . . . by radiant heating of the substrate
   C23C16/48D: . . . using incoherent light, UV to IR, e.g. lamps
   C23C16/48F: . . . using coherent light, UV to IR, e.g. lasers
   C23C16/48H: . . . using X-ray radiation
   C23C16/48J: . . . using synchrotron radiation
   C23C16/48L: . . . using ion beam radiation
   C23C16/48N: . . . using electron radiation
   C23C16/48P: . . . Protection of windows for introduction of radiation into the coating chamber
   C23C16/50: . . using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
   C23C16/503: . . . using dc or ac discharges
   C23C16/505: . . . using radio frequency discharges
   C23C16/507: . . . . using external electrodes, e.g. in tunnel type reactors
   C23C16/509: . . . . using internal electrodes
   C23C16/509B: . . . . . Coaxial electrodes
   C23C16/509D: . . . . . Flat-bed apparatus
   C23C16/511: . . . using microwave discharges
   C23C16/513: . . . using plasma jets
   C23C16/515: . . . using pulsed discharges
   C23C16/517: . . . using a combination of discharges covered by two or more of groups C23C16/503 to C23C16/515
   C23C16/52: . . Controlling or regulating the coating process
   C23C16/54: . . Apparatus specially adapted for continuous coating
   C23C16/54B: . . . for coating elongated substrates
   C23C16/56: After-treatment
   C23C18/00: Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating ; Contact plating
   C23C18/02: by thermal decomposition
   C23C18/04: . . Pre-treatment of the material to be coated
   C23C18/06: . . Coating on selected surface areas, e.g. using masks
   C23C18/08: . . characterised by the deposition of metallic material
   C23C18/10: . . . Deposition of aluminium only
   C23C18/12: . . characterised by the deposition of inorganic material other than metallic material
   C23C18/12C: . . . 
   C23C18/12C2: . . . . Oxides, e.g. ceramics
   C23C18/12C2B: . . . . . Zeolites, glasses
   C23C18/12C2D: . . . . . Metal oxides C23C18/12C2B takes precedence
   C23C18/12C4: . . . . Inorganic polymers, e.g. silanes, polysilazanes, polysiloxanes
   C23C18/12E: . . . Deposition of multilayers of inorganic material
   C23C18/12G: . . . Composition of the substrate
   C23C18/12G2: . . . . Organic substrates
   C23C18/12G2B: . . . . . Composite substrates, e.g. laminated, premixed
   C23C18/12G4: . . . . Metallic substrates
   C23C18/12G6: . . . . Inorganic substrates other than metallic
   C23C18/12J: . . . Process of deposition of the inorganic material
   C23C18/12J10: . . . . performed under reactive atmosphere, e.g. oxidising or reducing atmospheres
   C23C18/12J12: . . . . Control of temperature, e.g. gradual temperature increase, modulation of temperature
   C23C18/12J14: . . . . with flow inducing means, e.g. ultrasonic
   C23C18/12J16: . . . . by heating of the substrate
   C23C18/12J18: . . . . with after-treatment of the deposited inorganic material
   C23C18/12J2: . . . . Sol or sol-gel processing
   C23C18/12J4: . . . . Spray pyrolysis
   C23C18/12J6: . . . . involving particles, e.g. carbon nanotubes (CNT), flakes
   C23C18/12J6B: . . . . . Particles formed in situ
   C23C18/12J6D: . . . . . Preformed particles
   C23C18/12J8: . . . . performed under inert atmosphere
   C23C18/14: Decomposition by irradiation, e.g. photolysis, particle radiation
   C23C18/16: by reduction or substitution, e.g. electroless plating
   C23C18/16B: . . Process or apparatus
   C23C18/16B2: . . . coating on selected surface areas
   C23C18/16B2B: . . . . by masking
   C23C18/16B2D: . . . . [N: by direct patterning]
   C23C18/16B2D2: . . . . . [N: from pretreatment step, i.e. selective pre-treatment]
   C23C18/16B2D4: . . . . . [N: from plating step, e.g. inkjet]
   C23C18/16B2D6: . . . . . [N: through irradiation means]
   C23C18/16B2F: . . . . [N: plating on one side]
   C23C18/16B2F2: . . . . . [N: interior or inner surface]
   C23C18/16B4: . . . Purification and regeneration of coating baths
   C23C18/16B6: . . . Apparatus for electroless plating
   C23C18/16B6B: . . . . [N: Protection of inner surfaces of the apparatus]
   C23C18/16B6B2: . . . . . [N: through electrochemical processes]
   C23C18/16B6B4: . . . . . [N: through chemical processes]
   C23C18/16B6B6: . . . . . [N: through mechanical processes]
   C23C18/16B6D: . . . . [N: Specific elements or parts of the apparatus]
   C23C18/16B6D2: . . . . . [N: Supporting devices for articles to be coated]
   C23C18/16B6F: . . . . [N: Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells]
   C23C18/16B8: . . . [N: Process of electroless plating]
   C23C18/16B8B: . . . . [N: Composition of the substrate]
   C23C18/16B8B2: . . . . . [N: metallic substrate]
   C23C18/16B8B4: . . . . . [N: Substrates other than metallic, e.g. inorganic or organic or non-conductive]
   C23C18/16B8B4B: . . . . . . [N: Organic substrates, e.g. resin, plastic]
   C23C18/16B8B4D: . . . . . . [N: semiconductor (semiconductor H01L21/288)]
   C23C18/16B8B6: . . . . . [N: porous substrates]
   C23C18/16B8D: . . . . [N: Characteristics of the product obtained]
   C23C18/16B8D2: . . . . . [N: Porous product]
   C23C18/16B8D4: . . . . . [N: Multilayered product (layered product B32B)]
   C23C18/16B8D4B: . . . . . . [N: Two or more layers only obtained by electroless plating]
   C23C18/16B8D4D: . . . . . . [N: Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating]
   C23C18/16B8F: . . . . [N: Process features]
   C23C18/16B8F10: . . . . . [N: with additional means during the plating process]
   C23C18/16B8F10B: . . . . . . [N: Ultrasonics]
   C23C18/16B8F10D: . . . . . . [N: Radiant energy, e.g. laser]
   C23C18/16B8F10F: . . . . . . [N: Agitation, e. g. air introduction]
   C23C18/16B8F10H: . . . . . . [N: Electric field]
   C23C18/16B8F10K: . . . . . . [N: Magnetic field]
   C23C18/16B8F2: . . . . . [N: Electroless forming, i.e. substrate removed or destroyed at the end of the process]
   C23C18/16B8F4: . . . . . [N: with two steps starting with metal deposition followed by addition of reducing agent]
   C23C18/16B8F6: . . . . . [N: with two steps starting with addition of reducing agent followed by metal deposition]
   C23C18/16B8F8: . . . . . [N: Use of incorporated material in the solution or dispersion, e.g. particles, whiskers, wires]
   C23C18/16B8H: . . . . [N: Process conditions]
   C23C18/16B8H10: . . . . . [N: Control of electrolyte composition, e.g. measurement, adjustment (regeneration of bath C23C18/16B4)]
   C23C18/16B8H12: . . . . . [N: with supercritical condition, e.g. chemical fluid deposition]
   C23C18/16B8H14: . . . . . [N: with ionic liquid]
   C23C18/16B8H2: . . . . . [N: Heating of the solution]
   C23C18/16B8H4: . . . . . [N. Heating of the substrate]
   C23C18/16B8H6: . . . . . [N: Control of temperature, e.g. temperature of bath, substrate]
   C23C18/16B8H8: . . . . . [N: Control of atmosphere]
   C23C18/16B8K: . . . . [N: After-treatment]
   C23C18/16B8K2: . . . . . [N: Cooling, e g. forced or controlled cooling]
   C23C18/16B8K4: . . . . . [N: Heat-treatment]
   C23C18/16B8K4B: . . . . . . [N: Sequential heat treatment]
   C23C18/16B8K6: . . . . . . [N: Control of atmosphere]
   C23C18/16B8K8: . . . . . . [N: Control of temperature]
   C23C18/18: . . Pre-treatment of the material to be coated
   C23C18/18A: . . . of metallic material surfaces or of a non-specific material surfaces
   C23C18/18A2: . . . . [N: by mechanical pretreatment, e.g. grinding, sanding]
   C23C18/18A2B: . . . . . [N: by formation of electrostatic charges, e.g. tribofriction]
   C23C18/18A4: . . . . [N: by radiant energy]
   C23C18/18A4B: . . . . . [N: Heat]
   C23C18/18A4D: . . . . . [N: Radiation, e.g. UV, laser]
   C23C18/18A6: . . . . [N: by chemical pretreatment]
   C23C18/18A6B: . . . . . [N: only one step pretreatment]
   C23C18/18A6B2: . . . . . . [N: Use of metal, e.g. activation, sensitisation with noble metals]
   C23C18/18A6B4: . . . . . . [N: Use of organic or inorganic compounds other than metals, e.g. activation, sensitisation with polymers]
   C23C18/18A6D: . . . . . [N: Multistep pretreatment]
   C23C18/18A6D2: . . . . . . [N: with use of metal first]
   C23C18/18A6D4: . . . . . . [N: with use of organic or inorganic compounds other than metals, first]
   C23C18/18A8: . . . . [N: by electrochemical pretreatment]
   C23C18/18B: . . . of surfaces of non-metallic or semiconducting in organic material
   C23C18/18B2: . . . . by mechanical pretreatment, e.g. grinding, sanding
   C23C18/18B2B: . . . . . [N: by formation of electrostatic charges, e.g. tribofriction]
   C23C18/18B4: . . . . [N: by radiant energy]
   C23C18/18B4B: . . . . . [N: Heat]
   C23C18/18B4D: . . . . . [N: Radiation, e.g. UV, laser]
   C23C18/18B6: . . . . [N: by chemical pretreatment]
   C23C18/18B6B: . . . . . [N: only one step pretreatment]
   C23C18/18B6B2: . . . . . . [N: Use of metal, e.g. activation, sensitisation with noble metals]
   C23C18/18B6B4: . . . . . . [N: Use of organic or inorganic compounds other than metals, e.g. activation, sensitisation with polymers]
   C23C18/18B6D: . . . . . [N: Multistep pretreatment]
   C23C18/18B6D2: . . . . . . [N: with use of metal first]
   C23C18/18B6D4: . . . . . . [N: with use of organic or inorganic compounds other than metals, first]
   C23C18/18B8: . . . . [N: by electrochemical pretreatment]
   C23C18/20: . . . of organic surfaces, e.g. resins
   C23C18/20B: . . . . by other methods than those of C23C18/22 to C23C18/30
   C23C18/20B2: . . . . . by mechanical pretreatment, e.g. grinding, sanding
   C23C18/20B2B: . . . . . . [N: by formation of electrostatic charges, e.g. tribofriction]
   C23C18/20B4: . . . . . [N: by radiant energy]
   C23C18/20B4B: . . . . . . [N: Heat]
   C23C18/20B4D: . . . . . . [N: Radiation, e.g. UV, laser]
   C23C18/20B6: . . . . . [N: by chemical pretreatment]
   C23C18/20B6B: . . . . . . [N: only one step pretreatment]
   C23C18/20B6B2: . . . . . . . [N: Use of metal other than noble metals and tin, e.g. activation, sensitisation with metals (Sensitising with tin C23C18/28B, sensitising with noble metals C23C18/30)]
   C23C18/20B6B4: . . . . . . . [N: Use of organic or inorganic compounds other than metals, e.g. activation, sensitisation with polymers]
   C23C18/20B6D: . . . . . . [N: Multistep pretreatment]
   C23C18/20B6D2: . . . . . . . [N: with use of metal first]
   C23C18/20B6D4: . . . . . . . [N: with use of organic or inorganic compounds other than metals, first]
   C23C18/20B8: . . . . . [N: by electrochemical pretreatment]
   C23C18/22: . . . . Roughening, e.g. by etching
   C23C18/24: . . . . . using acid aqueous solutions
   C23C18/26: . . . . . using organic liquids
   C23C18/28: . . . . Sensitising or activating (not used, see subgroups)
   C23C18/28B: . . . . . Sensitising or activating with tin based compound or composition
   C23C18/30: . . . . . Activating or accelerating or sensitising with palladium or other noble metal
   C23C18/31: . . Coating with metals
   C23C18/32: . . . Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
   C23C18/34: . . . . using reducing agents
   C23C18/36: . . . . . using hypophosphites
   C23C18/38: . . . Coating with copper
   C23C18/40: . . . . using reducing agents
   C23C18/40B: . . . . . Formaldehyde
   C23C18/42: . . . Coating with noble metals
   C23C18/44: . . . . using reducing agents
   C23C18/48: . . Coating with alloys
   C23C18/50: . . . with alloys based on iron, cobalt or nickel
   C23C18/52: . . using reducing agents for coating with metallic material not provided for in a single one of groups C23C18/32 to C23C18/50
   C23C18/54: Contact plating, i.e. electroless electrochemical plating
   C23C20/00: Chemical coating by decomposition of either solid compounds or suspensions of the coating forming compounds, without leaving reaction products of surface material in the coating
   C23C20/02: Coating with metallic material
   C23C20/04: . . with metals
   C23C20/06: Coating with inorganic material, other than metallic material
   C23C20/08: . . with compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
   C23C22/00: Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
   C23C22/02: using non-aqueous solutions
   C23C22/03: . . containing phosphorus compounds
   C23C22/04: . . containing hexavalent chromium compounds
   C23C22/05: using aqueous solutions
   C23C22/06: . . using aqueous acidic solutions with pH less than 6
   C23C22/07: . . . containing phosphates
   C23C22/08: . . . . Orthophosphates
   C23C22/10: . . . . . containing oxidants
   C23C22/12: . . . . . containing zinc cations
   C23C22/13: . . . . . . containing also nitrate or nitrite anions
   C23C22/14: . . . . . . containing also chlorate anions
   C23C22/16: . . . . . . containing also peroxy-compounds
   C23C22/17: . . . . . . containing also organic acids
   C23C22/18: . . . . . containing manganese cations
   C23C22/18B: . . . . . . containing also zinc cations
   C23C22/18B2: . . . . . . . containing also nickel cations
   C23C22/18E: . . . . . . containing also copper cations
   C23C22/18H: . . . . . . containing also magnesium cations
   C23C22/20: . . . . . containing aluminium cations
   C23C22/22: . . . . . containing alkaline earth metal cations
   C23C22/23: . . . . Condensed phosphates
   C23C22/24: . . . containing hexavalent chromium compounds
   C23C22/26: . . . . containing also organic compounds
   C23C22/27: . . . . . Acids
   C23C22/28: . . . . . Macromolecular compounds
   C23C22/30: . . . . containing also trivalent chromium
   C23C22/32: . . . . containing also pulverulent metals
   C23C22/33: . . . . containing also phosphates
   C23C22/34: . . . containing fluorides or complex fluorides
   C23C22/36: . . . . containing also phosphates
   C23C22/36A: . . . . . containing titanium, zirconium or hafnium compounds
   C23C22/36B: . . . . . containing also zinc cations
   C23C22/36D: . . . . . containing also manganese cations
   C23C22/36D2: . . . . . . containing also zinc and nickel cations
   C23C22/36F: . . . . . containing alkaline earth metal cations
   C23C22/36H: . . . . . containing magnesium cations
   C23C22/37: . . . . containing also hexavalent chromium compounds
   C23C22/38: . . . . . containing also phosphates
   C23C22/40: . . . containing molybdates, tungstates or vanadates
   C23C22/42: . . . . containing also phosphates
   C23C22/43: . . . . containing also hexavalent chromium compounds
   C23C22/44: . . . . containing also fluorides or complex fluorides
   C23C22/46: . . . containing oxalates
   C23C22/47: . . . . containing also phosphates
   C23C22/48: . . . not containing phosphates, hexavalent chromium compounds, fluorides or complex fluorides, molybdates, tungstates, vanadates or oxalates
   C23C22/50: . . . . Treatment of iron or alloys based thereon
   C23C22/52: . . . . Treatment of copper or alloys based thereon
   C23C22/53: . . . . Treatment of zinc or alloys based thereon
   C23C22/54: . . . . Treatment of refractory metals or alloys based thereon
   C23C22/56: . . . . Treatment of aluminium or alloys based thereon
   C23C22/57: . . . . Treatment of magnesium or alloys based thereon
   C23C22/58: . . . . Treatment of other metallic material
   C23C22/60: . . using alkaline aqueous solutions with pH greater than 8
   C23C22/62: . . . Treatment of iron or alloys based thereon
   C23C22/63: . . . Treatment of copper or alloys based thereon
   C23C22/64: . . . Treatment of refractory metals or alloys based thereon
   C23C22/66: . . . Treatment of aluminium or alloys based thereon
   C23C22/67: . . . . with solutions containing hexavalent chromium
   C23C22/68: . . using aqueous solutions with pH between 6 and 8
   C23C22/70: using melts
   C23C22/72: . . Treatment of iron or alloys based thereon
   C23C22/73: characterised by the process
   C23C22/74: . . for obtaining burned-in conversion coatings
   C23C22/76: . . Applying the liquid by spraying
   C23C22/77: . . Controlling or regulating of the coating process
   C23C22/78: Pre-treatment of the material to be coated
   C23C22/80: . . with solutions containing titanium or zirconium compounds
   C23C22/82: After-treatment
   C23C22/83: . . Chemical after-treatment
   C23C22/84: . . Dyeing
   C23C22/86: Regeneration of coating baths
   C23C24/00: Coating starting from inorganic powder
   C23C24/10D: . . . Coating containing only metal elements
   C23C24/02: by application of pressure only
   C23C24/04: . . Impact or kinetic deposition of particles
   C23C24/04B: . . . by trembling using impacting inert media
   C23C24/06: . . Compressing powdered coating material, e.g. by milling
   C23C24/08: by application of heat or pressure and heat
   C23C24/08B: . . without intermediate formation of a liquid in the layer
   C23C24/08B2: . . . Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
   C23C24/08B2B: . . . . Coating with metal alloys or metal elements only
   C23C24/08D: . . Coating with metallic material
   C23C24/08F: . . Coating containing only metal elements
   C23C24/10: . . with intermediate formation of a liquid phase in the layer
   C23C24/10B: . . . Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
   C23C24/10B2: . . . . Coating with metal alloys or metal elements only
   C23C26/00: Coating not provided for in groups C23C2/00 to C23C24/00
   C23C26/02: applying molten material to the substrate
   C23C28/00: Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 to C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
   C23C28/02: only coatings only including layers of metallic material
   C23C28/02A: . . including at least one metal alloy layer
   C23C28/02A2: . . . with at least one MCrAlX layer
   C23C28/02B: . . only coatings of metal elements only
   C23C28/02B2: . . . with at least one zinc-based layer
   C23C28/02C: . . including at least one amorphous metallic material layer
   C23C28/02D: . . including at least one metal matrix material comprising a mixture of at least two metals or metal phases or metal matrix composites, e.g. metal matrix with embedded inorganic hard particles, CERMET, MMC.
   C23C28/02F: . . Including graded layers in composition or in physical properties, e.g. density, porosity, grain size
   C23C28/04: only coatings of inorganic non-metallic material
   C23C28/04A: . . including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
   C23C28/04B: . . coatings specially adapted for cutting tools or wear applications.
   C23C28/04C: . . with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
   C23C28/04D: . . with layers graded in composition or physical properties
   C23C28/30: Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
   C23C28/32: . . including at least one pure metallic layer
   C23C28/321: . . . with at least one metal alloy layer
   C23C28/3215: . . . . at least one MCrAlX layer
   C23C28/322: . . . only coatings of metal elements only
   C23C28/3225: . . . . with at least one zinc-based layer
   C23C28/323: . . . with at least one amorphous metallic material layer
   C23C28/324: . . . with at least one metal matrix material layer comprising a mixture of at least two metals or metal phases or a metal-matrix material with hard embedded particles, e.g. WC-Me
   C23C28/325: . . . [with layers graded in composition or in physical properties]
   C23C28/34: . . including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
   C23C28/341: . . . with at least one carbide layer
   C23C28/343: . . . with at least one DLC or an amorphous carbon based layer, the layer being doped or not
   C23C28/345: . . . with at least one oxide layer
   C23C28/3455: . . . . with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
   C23C28/347: . . . with layers adapted for cutting tools or wear applications
   C23C28/36: . . including layers graded in composition or physical properties
   C23C28/40: Coatings including alternating layers following a pattern, a periodic or defined repetition
   C23C28/42: . . characterized by the composition of the alternating layers
   C23C28/44: . . characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
   C23C30/00: Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
   C23C30/00B: on hard metal substrates